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Stage System

Stage Menu Commands

Rev. D Dimension 3100 Manual 77

5. To exit the Move To (x,y) dialog box, click the Quit button.

5.2.5 Set Reference

The Set Reference panel is used to set the origin point on the sample surface to be used for all

subsequent Move To and Programmed Move operations. It is important to verify the reference

point (0,0) with programmed move sequences, since all moves are relative to the current origin. For

example, a program designed to move the stage to the four corners of a square sample when the

origin (0, 0) is set to the upper-left corner will not probe the same positions if the origin is changed

to the lower-right corner. It will avoid confusion to select a standard position as the usual origin

reference (e.g., lower-left corner), then reuse the same reference position with all samples.

On samples having a grid-like aspect (e.g., integrated circuits), the reference may be initially

deﬁned from a line (two points) rather than a single point. The reference line is deﬁned parallel to

some feature on the sample surface (e.g., an electronic trace on an integrated circuit). You may

complete this by deﬁning two points: an origin and a second point. Deﬁning the second point

compensates for sample rotation. To set a reference on the sample, complete the following:

1. Select the Focus Surface function under the Stage menu to focus on the sample and move

the sample to the desired origin.

2. Select the Set Reference option under the Stage menu. The screen offers five options to the

operator (see Figure 5.2g).

CAUTION: Always verify that the tip is off the surface before attempting stage

movements. If manual stage movements are attempted during

engagement (by turning the leadscrew knobs on the stage’s X-Y

slide assemblies) the tip and/or sample may be damaged.

ATTENTION: Il est impératif de toujours s’assurer que la pointe ne touche pas la

surface avant de bouger la platine porte-échantillon. Si la platine

porte échantillons est déplacée manuellement (en tournant les vis

des moteurs de la platine) la pointe et/ou l’échantillon pourraient

être endommagés.

ATTENTION: Überprüfen Sie immer zunächst, daß die Meßspitze nicht mehr auf

der Oberﬂäche ist, ehe Sie den XY-Verschiebetisch bewegen. Wenn

der XY-Verschiebetisch von Hand bewegt wird (indem die

Drehknöpfe an den Gewindestangen des XY-Verschiebetisches

gedreht werden), während sich das Mikroskop im Engage-Zustand

beﬁndet, können Meßspitze und/oder Probe beschädigt werden.

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