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Calibration

Linearity Correction

Rev. D Dimension 3100 Manual 317

9. Align one side of the zoom box with desired features and observe how the other side aligns

with the features under it.

10. Compare the beginning third of the scan to the features in the end third of the scan. If the

features are too large to fit an equal number inside the zoom box, decrease the Fast mag0

value. If the features are too small, increase the Fast mag0 value. Change Fast mag0 by

about 0.1 to 0.3 units at a time.

11. The entire scan axis is affected each time a parameter changes, so after every change, resize

the zoom box at the beginning third of the scan and compare again with the end third.

Figure 17.4a Fast Scan Linearization: Mag0

Adjusting Fast arg

1. Once the beginning third of the scan is equal to the end third, check to see if the center needs

adjusting.

2. If the center features are too large for the box, decrease the Fast arg value. If the center

features are too small, increase the Fast arg value. Change args by 0.2 to 0.5 units at a time.

3. Changes affect the entire scan, so continue to resize the zoom box after each change.

4. After an adjustment in Fast arg is made, Fast mag0 may need readjusting. Repeat Fast

mag0 adjustment procedure until the rulings are evenly spaced across the Fast-axis.

Figure 17.4b X Scan Linearization

Mag0 Too Large Mag0 Too Small

Center Compressed Center Expanded

1 2 ... 332 333 334 335 336 337 338 339 340 341 342 ... 375 376

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