Dell 3100 Especificações Página 32

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System Overview
Dimension 3100 SPM Overview
12 Dimension 3100 Manual Rev. D
Figure 1.3d Dimension Head Scanner
The end of the scanner allows easy removal of the imaging probe assembly. This permits loading
the tip on a separate fixture such that head removal becomes unnecessary.
Table 1.3a Scanner Piezo Tube Specifications
Specification Value
Travel (approximate scan size)
x-axis 90µm
y-axis 90µm
z-axis 6µm
Electronic Resolution 16-bit (all axes)
Accuracy
typical 1%
maximum 2%
Orthogonality 2 degrees
Uncorrected Z bow
90µm scan size 50nm
10µm scan size 2nm
Y
X-X
-Y
Z
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