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Calibration

Calibrating Z

Rev. D Dimension 3100 Manual 331

17.8 Calibrating Z

In terms of obtaining accurate Z-axis measurements, it is generally not difﬁcult to obtain accurate

X-Y calibration references; however, it is much more difﬁcult to obtain accurate Z-axis results. Z-

axis calibration is very sample-dependent. It is difﬁcult to control Z piezo dynamics because the Z-

axis does not move at a constant rate as the X- and Y-axes do during scanning. Furthermore, offsets

affect the piezo over a period of minutes. The silicon calibration references distributed by Veeco

have 200nm vertical features accurate to within ± 3 percent. The calibration reference is referred to

throughout the examples provided in this section. If you require greater accuracy, you must select

an appropriate calibration standard, and a metrology head employed with a Veeco Dimension Series

microscope.

Note: Refer to the label on your calibration reference sample to verify the

measurement employed is 200nm. Older systems may have samples with a

different Z value.

17.8.1 Engage

1. Set up the microscope for TappingMode imaging.

2. Select Engage under the Motor pop-down menu or click on the Engage icon.

3. Find a square pit and center the pit in the image using a Scan size of approximately 10µm.

4. Change the aspect ratio to 4:1, and verify that the image includes the pit along with portions

of the surrounding flat area (see Figure 17.8a).

Figure 17.8a Z Calibration Image

5. Verify that the Z Center Position value shown next to the image display is close to 0 volts

(±5 volts).

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