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Calibration

Linearity Correction

316 Dimension 3100 Manual Rev. D

17.4 Linearity Correction

For applications which demand good linearity, the following procedure can be used to optimize the

linearity correction parameters for individual scanners. As discussed previously, linearity correction

is especially important for long-range scanners.

17.4.1 Adjust Mag0 and Arg

1. Select Microscope > Calibrate > Scanner to display the Scanner Calibration dialog box.

2. Set the mag0 and arg values while noting the scan beginning and ending.

Note: When Line direction is set to Trace, the beginning of the fast scan is on the

left, as indicated by the arrow base. Because the display monitor screen itself is

not linear, use the Realtime Zoom box to check mag0 and arg.

Note: When viewing up or down scans, check the image against itself, not the

residual image from the previous scan. Be careful to compare only the part of

the scan drawn since the last parameter change.

Adjust Fast Mag0

1. After engaging, click on Microscope > Calibrate > Scanner to open the Scanner

Calibration window. As parameters values are changed, the effects will be seen on the

display monitor.

2. Move the mouse cursor to the display monitor and select Zoom Out to produce a box whose

size and position can be changed by alternate clicks on the left mouse button.

3. Adjust the box until it is about one-third the size of the scan.

4. Click once on the right mouse button to set the box, free the cursor, and move to Execute.

Note: Clicking twice will execute a Zoom, which you do not want to do.

5. Select Fast mag0, the first scanner parameter to modify.

6. Move the zoom box to the start of the fast scan (on the left if the Line direction is set to

Trace).

7. Move and size the zoom box until the beginning third of the scan's features are exactly

aligned with the zoom box.

Note: The beginning third of the scan is the standard for judging almost all of the

linearity values. Ignore the set of features near the edges of the scan since these

may be distorted slightly.

8. Move the zoom box to the end third of the scan.

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Dell 3100 Especificações Página 336